Please use this identifier to cite or link to this item: http://localhost/handle/Hannan/633037
Title: A Novel Sloped Field Plate-Enhanced Ultra-Short Edge Termination Structure
Authors: Wentao Yang;Hao Feng;Xiangming Fang;Yuichi Onozawa;Hiroyuki Tanaka;Johnny K. O. Sin
subject: high-voltage p-i-n diode|sloped field plate|plate-enhanced termination structure|sloped field termination structure|ultra-short edge termination structure|planar junction breakdown voltage|benzocyclobutene dielectric filled trench|anode electrode|voltage 755 V
Year: 2016
Publisher: IEEE
Abstract: A novel sloped field plate (FP)-enhanced ultra-short edge termination structure is proposed and experimentally demonstrated. The structure features a benzocyclobutene dielectric filled trench, and is fabricated along with a high-voltage p-i-n diode. In addition, a sloped FP is put inside the trench and connected to the anode electrode. The fabricated device shows a breakdown voltage of 755 V, and is confirmed as the ideal planar junction breakdown voltage of the p-i-n diode. The proposed edge termination structure has a total width of 35 μm, which is ~1/5 the size of a conventional termination structure using the guard rings approach.
URI: http://localhost/handle/Hannan/166480
http://localhost/handle/Hannan/633037
ISSN: 0741-3106
1558-0563
volume: 37
issue: 4
Appears in Collections:2016

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Title: A Novel Sloped Field Plate-Enhanced Ultra-Short Edge Termination Structure
Authors: Wentao Yang;Hao Feng;Xiangming Fang;Yuichi Onozawa;Hiroyuki Tanaka;Johnny K. O. Sin
subject: high-voltage p-i-n diode|sloped field plate|plate-enhanced termination structure|sloped field termination structure|ultra-short edge termination structure|planar junction breakdown voltage|benzocyclobutene dielectric filled trench|anode electrode|voltage 755 V
Year: 2016
Publisher: IEEE
Abstract: A novel sloped field plate (FP)-enhanced ultra-short edge termination structure is proposed and experimentally demonstrated. The structure features a benzocyclobutene dielectric filled trench, and is fabricated along with a high-voltage p-i-n diode. In addition, a sloped FP is put inside the trench and connected to the anode electrode. The fabricated device shows a breakdown voltage of 755 V, and is confirmed as the ideal planar junction breakdown voltage of the p-i-n diode. The proposed edge termination structure has a total width of 35 μm, which is ~1/5 the size of a conventional termination structure using the guard rings approach.
URI: http://localhost/handle/Hannan/166480
http://localhost/handle/Hannan/633037
ISSN: 0741-3106
1558-0563
volume: 37
issue: 4
Appears in Collections:2016

Files in This Item:
File Description SizeFormat 
7438992.pdf788.15 kBAdobe PDFThumbnail
Preview File
Title: A Novel Sloped Field Plate-Enhanced Ultra-Short Edge Termination Structure
Authors: Wentao Yang;Hao Feng;Xiangming Fang;Yuichi Onozawa;Hiroyuki Tanaka;Johnny K. O. Sin
subject: high-voltage p-i-n diode|sloped field plate|plate-enhanced termination structure|sloped field termination structure|ultra-short edge termination structure|planar junction breakdown voltage|benzocyclobutene dielectric filled trench|anode electrode|voltage 755 V
Year: 2016
Publisher: IEEE
Abstract: A novel sloped field plate (FP)-enhanced ultra-short edge termination structure is proposed and experimentally demonstrated. The structure features a benzocyclobutene dielectric filled trench, and is fabricated along with a high-voltage p-i-n diode. In addition, a sloped FP is put inside the trench and connected to the anode electrode. The fabricated device shows a breakdown voltage of 755 V, and is confirmed as the ideal planar junction breakdown voltage of the p-i-n diode. The proposed edge termination structure has a total width of 35 μm, which is ~1/5 the size of a conventional termination structure using the guard rings approach.
URI: http://localhost/handle/Hannan/166480
http://localhost/handle/Hannan/633037
ISSN: 0741-3106
1558-0563
volume: 37
issue: 4
Appears in Collections:2016

Files in This Item:
File Description SizeFormat 
7438992.pdf788.15 kBAdobe PDFThumbnail
Preview File