Please use this identifier to cite or link to this item: http://localhost/handle/Hannan/121280
Title: Microscale Compression and Shear Testing of Soft Materials Using an MEMS Microgripper With Two-Axis Actuators and Force Sensors
Authors: Juntian Qu;Weize Zhang;Andrew Jung;Simon Silva-Da Cruz;Xinyu Liu
Year: 2017
Publisher: IEEE
Abstract: This paper reports a microelectromechanical systems (MEMS)-based microgripper, integrating two-axis actuators and force sensors, for microscale compression and shear testing of soft materials. The device employs V-beam electrothermal actuators to drive an active gripping arm and compress or shear a microscale sample grasped at the gripping tips, and two triplate differential capacitive sensors to measure the compression and shear forces applied to the sample with nanonewton resolution (compressive force resolution: 7.7 nN, and shear force resolution: 57.5 nN). Using the microgripper, we demonstrate, for the first time, on-chip compression and shear testing of polydimethylsiloxane (PDMS) microstructures prepared at different crosslinking levels. We believe that this device will be useful for accurately characterizing mechanical properties of a variety of microscale soft materials.
URI: http://localhost/handle/Hannan/121280
volume: 14
issue: 2
More Information: 834,
843
Appears in Collections:2017

Files in This Item:
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7795234.pdf4.06 MBAdobe PDF
Title: Microscale Compression and Shear Testing of Soft Materials Using an MEMS Microgripper With Two-Axis Actuators and Force Sensors
Authors: Juntian Qu;Weize Zhang;Andrew Jung;Simon Silva-Da Cruz;Xinyu Liu
Year: 2017
Publisher: IEEE
Abstract: This paper reports a microelectromechanical systems (MEMS)-based microgripper, integrating two-axis actuators and force sensors, for microscale compression and shear testing of soft materials. The device employs V-beam electrothermal actuators to drive an active gripping arm and compress or shear a microscale sample grasped at the gripping tips, and two triplate differential capacitive sensors to measure the compression and shear forces applied to the sample with nanonewton resolution (compressive force resolution: 7.7 nN, and shear force resolution: 57.5 nN). Using the microgripper, we demonstrate, for the first time, on-chip compression and shear testing of polydimethylsiloxane (PDMS) microstructures prepared at different crosslinking levels. We believe that this device will be useful for accurately characterizing mechanical properties of a variety of microscale soft materials.
URI: http://localhost/handle/Hannan/121280
volume: 14
issue: 2
More Information: 834,
843
Appears in Collections:2017

Files in This Item:
File SizeFormat 
7795234.pdf4.06 MBAdobe PDF
Title: Microscale Compression and Shear Testing of Soft Materials Using an MEMS Microgripper With Two-Axis Actuators and Force Sensors
Authors: Juntian Qu;Weize Zhang;Andrew Jung;Simon Silva-Da Cruz;Xinyu Liu
Year: 2017
Publisher: IEEE
Abstract: This paper reports a microelectromechanical systems (MEMS)-based microgripper, integrating two-axis actuators and force sensors, for microscale compression and shear testing of soft materials. The device employs V-beam electrothermal actuators to drive an active gripping arm and compress or shear a microscale sample grasped at the gripping tips, and two triplate differential capacitive sensors to measure the compression and shear forces applied to the sample with nanonewton resolution (compressive force resolution: 7.7 nN, and shear force resolution: 57.5 nN). Using the microgripper, we demonstrate, for the first time, on-chip compression and shear testing of polydimethylsiloxane (PDMS) microstructures prepared at different crosslinking levels. We believe that this device will be useful for accurately characterizing mechanical properties of a variety of microscale soft materials.
URI: http://localhost/handle/Hannan/121280
volume: 14
issue: 2
More Information: 834,
843
Appears in Collections:2017

Files in This Item:
File SizeFormat 
7795234.pdf4.06 MBAdobe PDF