Dynamic Switching Characteristics of 1 A Forward Current <inline-formula> <tex-math notation="LaTeX">$\boldsymbol{\beta}$ </tex-math></inline-formula>-Ga₂O₃ Rectifiers

Abstract

An inductive load test circuit was used to measure the switching performance of fieldplated edge-terminated Schottky rectifiers with a reverse breakdown voltage of 760 V (0.1 cm diameter, <inline-formula xmlns:mml= http://www.w3.org/1998/Math/MathML xmlns:xlink= http://www.w3.org/1999/xlink > <tex-math notation= LaTeX >$7.85 \times 10.3 {\mathrm {cm}}^{2}$ </tex-math></inline-formula> area) and an absolute forward current of 1 A on 8 m thick epitaxial <inline-formula xmlns:mml= http://www.w3.org/1998/Math/MathML xmlns:xlink= http://www.w3.org/1999/xlink > <tex-math notation= LaTeX >$\beta$ </tex-math></inline-formula> -Ga <sub xmlns:mml= http://www.w3.org/1998/Math/MathML xmlns:xlink= http://www.w3.org/1999/xlink >2</sub> O <sub xmlns:mml= http://www.w3.org/1998/Math/MathML xmlns:xlink= http://www.w3.org/1999/xlink >3</sub> drift layers. The recovery characteristics for these vertical geometry <inline-formula xmlns:mml= http://www.w3.org/1998/Math/MathML xmlns:xlink= http://www.w3.org/1999/xlink > <tex-math notation= LaTeX >$\beta$ </tex-math></inline-formula> -Ga <sub xmlns:mml= http://www.w3.org/1998/Math/MathML xmlns:xlink= http://www.w3.org/1999/xlink >2</sub> O <sub xmlns:mml= http://www.w3.org/1998/Math/MathML xmlns:xlink= http://www.w3.org/1999/xlink >3</sub> Schottky rectifiers switching from forward current of 1 A to reverse off-state voltage of −300 V showed a recovery time (trr) of 64 ns. There was no significant temperature dependence of trr up to 150 °C.