Please use this identifier to cite or link to this item: http://localhost/handle/Hannan/595782
Title: Annealing Effect on Structural, Functional, and Device Properties of Flexible ZnO Acoustic Wave Sensors Based on Commercially Available Al Foil
Authors: Yong Liu;Jing Ting Luo;Chao Zhao;Jian Zhou;Sameer Ahmad Hasan;Yifan Li;Michael Cooke;Qiang Wu;Wai Pang Ng;Jiang Feng Du;Qi Yu;Yang Liu;Yong Qing Fu
subject: sensor|ZnO|surface acoustic wave (SAW)|annealing|Al|flexible
Year: 2016
Publisher: IEEE
Abstract: This paper reports post-annealing of zinc oxide (ZnO) films on flexible foil substrates in order to improve the functional and acoustic wave sensing performance. ZnO films of 5 μm thick were deposited onto aluminum foils (50 μm thick) using magnetron sputtering and then annealed in air at different temperatures between 300 °C and 500 °C. Effects of postannealing on structural, optical, and device properties of the ZnO films and ZnO/Al foil acoustic wave devices were investigated. A temperature of 350 °C was identified as the optimized annealing temperature, which resulted in good light transmission, improved crystallinity, reduced film stress/defects, and increased amplitude of reflection signals of both Lamb and Rayleigh waves. The annealed ZnO/Al acoustic wave devices demonstrated a large temperature coefficient of frequency and a good linearity, revealing the potential for precise temperature sensing.
URI: http://localhost/handle/Hannan/176509
http://localhost/handle/Hannan/595782
ISSN: 0018-9383
1557-9646
volume: 63
issue: 11
Appears in Collections:2016

Files in This Item:
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Title: Annealing Effect on Structural, Functional, and Device Properties of Flexible ZnO Acoustic Wave Sensors Based on Commercially Available Al Foil
Authors: Yong Liu;Jing Ting Luo;Chao Zhao;Jian Zhou;Sameer Ahmad Hasan;Yifan Li;Michael Cooke;Qiang Wu;Wai Pang Ng;Jiang Feng Du;Qi Yu;Yang Liu;Yong Qing Fu
subject: sensor|ZnO|surface acoustic wave (SAW)|annealing|Al|flexible
Year: 2016
Publisher: IEEE
Abstract: This paper reports post-annealing of zinc oxide (ZnO) films on flexible foil substrates in order to improve the functional and acoustic wave sensing performance. ZnO films of 5 μm thick were deposited onto aluminum foils (50 μm thick) using magnetron sputtering and then annealed in air at different temperatures between 300 °C and 500 °C. Effects of postannealing on structural, optical, and device properties of the ZnO films and ZnO/Al foil acoustic wave devices were investigated. A temperature of 350 °C was identified as the optimized annealing temperature, which resulted in good light transmission, improved crystallinity, reduced film stress/defects, and increased amplitude of reflection signals of both Lamb and Rayleigh waves. The annealed ZnO/Al acoustic wave devices demonstrated a large temperature coefficient of frequency and a good linearity, revealing the potential for precise temperature sensing.
URI: http://localhost/handle/Hannan/176509
http://localhost/handle/Hannan/595782
ISSN: 0018-9383
1557-9646
volume: 63
issue: 11
Appears in Collections:2016

Files in This Item:
File Description SizeFormat 
7588108.pdf1.86 MBAdobe PDFThumbnail
Preview File
Title: Annealing Effect on Structural, Functional, and Device Properties of Flexible ZnO Acoustic Wave Sensors Based on Commercially Available Al Foil
Authors: Yong Liu;Jing Ting Luo;Chao Zhao;Jian Zhou;Sameer Ahmad Hasan;Yifan Li;Michael Cooke;Qiang Wu;Wai Pang Ng;Jiang Feng Du;Qi Yu;Yang Liu;Yong Qing Fu
subject: sensor|ZnO|surface acoustic wave (SAW)|annealing|Al|flexible
Year: 2016
Publisher: IEEE
Abstract: This paper reports post-annealing of zinc oxide (ZnO) films on flexible foil substrates in order to improve the functional and acoustic wave sensing performance. ZnO films of 5 μm thick were deposited onto aluminum foils (50 μm thick) using magnetron sputtering and then annealed in air at different temperatures between 300 °C and 500 °C. Effects of postannealing on structural, optical, and device properties of the ZnO films and ZnO/Al foil acoustic wave devices were investigated. A temperature of 350 °C was identified as the optimized annealing temperature, which resulted in good light transmission, improved crystallinity, reduced film stress/defects, and increased amplitude of reflection signals of both Lamb and Rayleigh waves. The annealed ZnO/Al acoustic wave devices demonstrated a large temperature coefficient of frequency and a good linearity, revealing the potential for precise temperature sensing.
URI: http://localhost/handle/Hannan/176509
http://localhost/handle/Hannan/595782
ISSN: 0018-9383
1557-9646
volume: 63
issue: 11
Appears in Collections:2016

Files in This Item:
File Description SizeFormat 
7588108.pdf1.86 MBAdobe PDFThumbnail
Preview File