Please use this identifier to cite or link to this item: http://localhost/handle/Hannan/580393
Title: Operational Limitation and Instability of a Microwave-Induced Microplasma Enclosed in a Microcavity at Low Gas Pressures
Authors: Jiali Tang;Xinhai Yu;Zhenyu Wang;Shan-Tung Tu;Zhengdong Wang
subject: glow-to-arc transition (GAT)|extinguishing|Enclosed|microwave-induced microplasma|stability
Year: 2016
Publisher: IEEE
Abstract: In this paper, operational limitations (the extinguishing of the stable glow discharge) and instabilities [glow-to-arc transition (GAT)] of microwave-induced microplasmas enclosed in microcavities operated at low gas pressures were investigated by experiments, in comparison with unenclosed microplasmas. For enclosed microplasmas, when gas pressure decreased, GAT occasionally occurred, whereas GAT was never detected for unenclosed microplasmas, because the gas temperatures of enclosed microplasmas were higher than those of unenclosed ones. For enclosed microplasmas operated at low gas pressures, an increase in the microcavity dimension is a valid method to avoid GAT. Extinguishing pressure of stable glow-discharge microplasma (p<sub>ext</sub>) for microwave-induced microplasma enclosed in a microcavity microplasma was lower than that for microwave-induced microplasma generator without the PDMS cavity (UEC) microplasmas. The increase in input power decreased p<sub>ext</sub> for UEC microplasmas but showed a slight influence on p<sub>ext</sub> for EC microplasmas. This paper shed some light on understanding of the enclosed microplasmas operated at low gas pressures.
URI: http://localhost/handle/Hannan/154072
http://localhost/handle/Hannan/580393
ISSN: 0093-3813
1939-9375
volume: 44
issue: 10
Appears in Collections:2016

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Title: Operational Limitation and Instability of a Microwave-Induced Microplasma Enclosed in a Microcavity at Low Gas Pressures
Authors: Jiali Tang;Xinhai Yu;Zhenyu Wang;Shan-Tung Tu;Zhengdong Wang
subject: glow-to-arc transition (GAT)|extinguishing|Enclosed|microwave-induced microplasma|stability
Year: 2016
Publisher: IEEE
Abstract: In this paper, operational limitations (the extinguishing of the stable glow discharge) and instabilities [glow-to-arc transition (GAT)] of microwave-induced microplasmas enclosed in microcavities operated at low gas pressures were investigated by experiments, in comparison with unenclosed microplasmas. For enclosed microplasmas, when gas pressure decreased, GAT occasionally occurred, whereas GAT was never detected for unenclosed microplasmas, because the gas temperatures of enclosed microplasmas were higher than those of unenclosed ones. For enclosed microplasmas operated at low gas pressures, an increase in the microcavity dimension is a valid method to avoid GAT. Extinguishing pressure of stable glow-discharge microplasma (p<sub>ext</sub>) for microwave-induced microplasma enclosed in a microcavity microplasma was lower than that for microwave-induced microplasma generator without the PDMS cavity (UEC) microplasmas. The increase in input power decreased p<sub>ext</sub> for UEC microplasmas but showed a slight influence on p<sub>ext</sub> for EC microplasmas. This paper shed some light on understanding of the enclosed microplasmas operated at low gas pressures.
URI: http://localhost/handle/Hannan/154072
http://localhost/handle/Hannan/580393
ISSN: 0093-3813
1939-9375
volume: 44
issue: 10
Appears in Collections:2016

Files in This Item:
File Description SizeFormat 
7552516.pdf4.42 MBAdobe PDFThumbnail
Preview File
Title: Operational Limitation and Instability of a Microwave-Induced Microplasma Enclosed in a Microcavity at Low Gas Pressures
Authors: Jiali Tang;Xinhai Yu;Zhenyu Wang;Shan-Tung Tu;Zhengdong Wang
subject: glow-to-arc transition (GAT)|extinguishing|Enclosed|microwave-induced microplasma|stability
Year: 2016
Publisher: IEEE
Abstract: In this paper, operational limitations (the extinguishing of the stable glow discharge) and instabilities [glow-to-arc transition (GAT)] of microwave-induced microplasmas enclosed in microcavities operated at low gas pressures were investigated by experiments, in comparison with unenclosed microplasmas. For enclosed microplasmas, when gas pressure decreased, GAT occasionally occurred, whereas GAT was never detected for unenclosed microplasmas, because the gas temperatures of enclosed microplasmas were higher than those of unenclosed ones. For enclosed microplasmas operated at low gas pressures, an increase in the microcavity dimension is a valid method to avoid GAT. Extinguishing pressure of stable glow-discharge microplasma (p<sub>ext</sub>) for microwave-induced microplasma enclosed in a microcavity microplasma was lower than that for microwave-induced microplasma generator without the PDMS cavity (UEC) microplasmas. The increase in input power decreased p<sub>ext</sub> for UEC microplasmas but showed a slight influence on p<sub>ext</sub> for EC microplasmas. This paper shed some light on understanding of the enclosed microplasmas operated at low gas pressures.
URI: http://localhost/handle/Hannan/154072
http://localhost/handle/Hannan/580393
ISSN: 0093-3813
1939-9375
volume: 44
issue: 10
Appears in Collections:2016

Files in This Item:
File Description SizeFormat 
7552516.pdf4.42 MBAdobe PDFThumbnail
Preview File