Please use this identifier to cite or link to this item: http://localhost/handle/Hannan/30930
Title: Deep UV Lithography Process in Generic InP Integration for Arrayed Waveguide Gratings
Authors: J. Bolk|H. Ambrosius|R. Stabile|S. Latkowski|X. Leijtens|E. Bitincka|L. Augustin|D. Marsan|J. Darracq|K. Williams
subject: Arrayed waveguide grating|lithography|photonic integrated circuit|indium phosphide
Year: 2018
Publisher: IEEE
URI: http://localhost/handle/Hannan/30930
ISSN: 1041-1135
volume: Volume 30
issue: Issue 13
More Information: 1222
1225
IEEE Photonics Technology Letters
Appears in Collections:2018

Files in This Item:
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08364634.pdf2.36 MBAdobe PDFThumbnail
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Title: Deep UV Lithography Process in Generic InP Integration for Arrayed Waveguide Gratings
Authors: J. Bolk|H. Ambrosius|R. Stabile|S. Latkowski|X. Leijtens|E. Bitincka|L. Augustin|D. Marsan|J. Darracq|K. Williams
subject: Arrayed waveguide grating|lithography|photonic integrated circuit|indium phosphide
Year: 2018
Publisher: IEEE
URI: http://localhost/handle/Hannan/30930
ISSN: 1041-1135
volume: Volume 30
issue: Issue 13
More Information: 1222
1225
IEEE Photonics Technology Letters
Appears in Collections:2018

Files in This Item:
File Description SizeFormat 
08364634.pdf2.36 MBAdobe PDFThumbnail
Preview File
Title: Deep UV Lithography Process in Generic InP Integration for Arrayed Waveguide Gratings
Authors: J. Bolk|H. Ambrosius|R. Stabile|S. Latkowski|X. Leijtens|E. Bitincka|L. Augustin|D. Marsan|J. Darracq|K. Williams
subject: Arrayed waveguide grating|lithography|photonic integrated circuit|indium phosphide
Year: 2018
Publisher: IEEE
URI: http://localhost/handle/Hannan/30930
ISSN: 1041-1135
volume: Volume 30
issue: Issue 13
More Information: 1222
1225
IEEE Photonics Technology Letters
Appears in Collections:2018

Files in This Item:
File Description SizeFormat 
08364634.pdf2.36 MBAdobe PDFThumbnail
Preview File