Please use this identifier to cite or link to this item: http://localhost/handle/Hannan/220254
Title: Development of a Novel Parasitic-Type Piezoelectric Actuator
Authors: Jianping Li;Xiaoqin Zhou;Hongwei Zhao;Mingkun Shao;Ning Li;Shizhong Zhang;Yumeng Du
Year: 2017
Publisher: IEEE
Abstract: A piezoelectric actuator based on parasitic motion principle is proposed and tested. The piezoelectric actuator is explored to simultaneously realize coarse (long stroke) and fine (high accuracy) motions using dual-servo control method. The working principle of the proposed piezoelectric actuator is discussed, and finite-element method is adopted. A dynamic model of parasitic motion based on the LuGre friction model is simulated using matlab/Simulink. A prototype is manufactured to investigate working performance. Experimental results indicate that the maximum speed of the presented parasitic-type piezoelectric actuator is 7.95 mm/s and the resolution is 10 nm. These findings confirm the feasibility of the dual-servo nanopositioning system using piezoelectric stacks and flexure hinges.
URI: http://localhost/handle/Hannan/220254
volume: 22
issue: 1
More Information: 541,
550
Appears in Collections:2017

Files in This Item:
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7556278.pdf1.03 MBAdobe PDF
Title: Development of a Novel Parasitic-Type Piezoelectric Actuator
Authors: Jianping Li;Xiaoqin Zhou;Hongwei Zhao;Mingkun Shao;Ning Li;Shizhong Zhang;Yumeng Du
Year: 2017
Publisher: IEEE
Abstract: A piezoelectric actuator based on parasitic motion principle is proposed and tested. The piezoelectric actuator is explored to simultaneously realize coarse (long stroke) and fine (high accuracy) motions using dual-servo control method. The working principle of the proposed piezoelectric actuator is discussed, and finite-element method is adopted. A dynamic model of parasitic motion based on the LuGre friction model is simulated using matlab/Simulink. A prototype is manufactured to investigate working performance. Experimental results indicate that the maximum speed of the presented parasitic-type piezoelectric actuator is 7.95 mm/s and the resolution is 10 nm. These findings confirm the feasibility of the dual-servo nanopositioning system using piezoelectric stacks and flexure hinges.
URI: http://localhost/handle/Hannan/220254
volume: 22
issue: 1
More Information: 541,
550
Appears in Collections:2017

Files in This Item:
File SizeFormat 
7556278.pdf1.03 MBAdobe PDF
Title: Development of a Novel Parasitic-Type Piezoelectric Actuator
Authors: Jianping Li;Xiaoqin Zhou;Hongwei Zhao;Mingkun Shao;Ning Li;Shizhong Zhang;Yumeng Du
Year: 2017
Publisher: IEEE
Abstract: A piezoelectric actuator based on parasitic motion principle is proposed and tested. The piezoelectric actuator is explored to simultaneously realize coarse (long stroke) and fine (high accuracy) motions using dual-servo control method. The working principle of the proposed piezoelectric actuator is discussed, and finite-element method is adopted. A dynamic model of parasitic motion based on the LuGre friction model is simulated using matlab/Simulink. A prototype is manufactured to investigate working performance. Experimental results indicate that the maximum speed of the presented parasitic-type piezoelectric actuator is 7.95 mm/s and the resolution is 10 nm. These findings confirm the feasibility of the dual-servo nanopositioning system using piezoelectric stacks and flexure hinges.
URI: http://localhost/handle/Hannan/220254
volume: 22
issue: 1
More Information: 541,
550
Appears in Collections:2017

Files in This Item:
File SizeFormat 
7556278.pdf1.03 MBAdobe PDF